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TSMC revealing details about next gen A14 node

Recorded: Sept. 17, 2026, 7:08 p.m.

Original Summarized

IEEE IEDM 2026 | 3-2 | A14 CMOS NanoFlexTM Pro Platform Technology with 2nd Gen. Nano-sheet and Full Node PPA Benefits for HPC/AI and Mobile SoC Applications

IEEE IEDM 2026
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Dec. 12- 16

San Francisco

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3-2 | A14 CMOS NanoFlexTM Pro Platform Technology with 2nd Gen. Nano-sheet and Full Node PPA Benefits for HPC/AI and Mobile SoC Applications

Level

Regular Submission

Type

Technical Session

Abstract

A14 NanoFlexTM Pro platform technology features the world’s smallest SRAM with a cell size <0.017μm2 and highest SRAM macro density to date through dimensional ground rule scaling. Coupled with standard cell innovations, it delivers a full-node PPA improvement over the predecessor N2 technology for a 10~15% speed enhancement, a 25~30% power reduction and a chip density increase by ~20% driven by logic and SRAM scaling. Key features, such as TSV, innovative RDL that enables SoIC bond pitch of 4.5μm and high-performance MiM processes, have also been developed to accelerate the system-level integration and scaling for SoIC products. Supported by robust yield and device progress, A14 technology is on track for volume production in 2028.

Description

Speakers

Presenting Author

Shien-Yang Wu

Taiwan Semiconductor Manufacturing Company (TSMC)

Tracks

Advanced Logic Technology (ALT)

Parent Sessions

Mon. Dec. 14 | 1:45 PM
- 4:45 PM  –

3 | ALT | Platform and DTCO

IEEE IEDM 2026•©2026 All Rights Reserved

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The A14 NanoFlexTM Pro platform technology is introduced, which incorporates a second generation of nano-sheet and full node advancements to deliver significant Power, Performance, and Area (PPA) benefits tailored for High Performance Computing (HPC), Artificial Intelligence (AI), and Mobile System-on-Chip (SoC) applications. This technology features the world's smallest SRAM with a cell size smaller than 0.017 square micrometers, achieving the highest SRAM macro density to date through extensive dimensional ground rule scaling. Coupled with innovations in standard cell design, the A14 technology provides a full-node PPA improvement over the preceding N2 technology, manifesting as a ten to fifteen percent speed enhancement, a twenty-five to thirty percent power reduction, and an approximate twenty percent increase in chip density, all driven by the scaling of logic and SRAM elements. Furthermore, to expedite system-level integration and scaling for SoIC products, the technology includes key features such as Through-Silicon Vias (TSV), innovative Read-Before-Layer (RDL) capabilities that allow for a System-on-Insulator (SoIC) bond pitch of 4.5 micrometers, and high-performance Multi-Mission (MiM) processes. Supported by robust yield and device progress, the A14 technology is projected to enter volume production by 2028. This work was presented by Shien-Yang Wu of the Taiwan Semiconductor Manufacturing Company.